Selection of recent papers

A full list of papers can be downloaded here

►   Ultrathin TiN membranes as a Technology Platform
      for CMOS-integrated MEMS and BioMEMS Devices 
      M. Birkholz, K.-E. Ehwald, P. Kulse, J. Drews, M. Fröhlich, 
      U. Haak, M. Kaynak, E. Matthus, K. Schulz, D. Wolansky
      Advanced Functional Materials 21 (2011) 1652 - 1656 

►   Corrosion-resistant metal layers 
      from a CMOS process for bioelectronic applications
      M. Birkholz, K.-E. Ehwald, D. Wolansky, I. Costina,    
      C. Baristiran-Kaynak, M. Fröhlich, H. Beyer, A. Kapp, F. Lisdat 
      Surface and Coatings Technology 204 (2010) 2055 – 2059

►   A thin film approach to protein crystallography 
      M. Birkholz
      Nuclear Instruments & Methods in Physics B 268 (2010) 414 – 419

►   Separation of extremely miniaturized medical sensors by IR laser dicing
      M. Birkholz, K.-E. Ehwald, M. Kaynak, 
      T. Semperowitsch, B. Holz, S. Nordhoff
      Journal of Optoelectronic and Advanced Materials 12 (2010) 479 – 483

►   BEOL-Integrated RFMEMS Switch for mm-Wave Applications
      M. Kaynak, K.-E. Ehwald, J. Drews, R. F. Scholz, F. Korndörfer, D. Knoll, B.
      Tillack, M. Birkholz, K. Schulz, Y. M. Sun, D. Wolansky, S. Leidich, S. Kurth
      IEEE Technical Digest IEDM 09-800 (2009) 33.4            

►   Profiling of Fiber Texture Gradients 
      in Thin Films by Anomalous X-ray Diffraction
      M. Birkholz, N. Darowski, I. Zizak
      Zeitschrift für Kristallographie 27 (2008) 263 – 271

►   Interatomic distances in pyrite-structure disulfides
      – a case for ellipsoidal modeling of sulfur ions
      M. Birkholz, R. Rudert
      physica status solidi (b) 245 (2008) 1858 – 1864

►   Modelling of Diffraction from Fiber Texture Gradients
      in Thin Polycrystalline Films
      M. Birkholz
      Journal of Applied Crystallography 40 (2007) 735-742

►   Small-Angle Reciprocal Space Mapping of Surface Relief Gratings
      M. Birkholz, P. Zaumseil, J. Bauer, D. Bolze, G. Weidner
      Materials Science and Engineering C 27 (2007) 1154 - 1157

►   Structure of Biomembrane-on-Silicon Hybrids
      Derived from X-ray Reflectometry
      M. Birkholz, P. Zaumseil, M. Kittler, I. Wallat, M. Heyn
      Materials Science and Engineering B 134 (2006) 125-129

►   Self-Organized Pattern Formation of Biomolecules at Silicon Interfaces
      M. Kittler, X. Yu, O. F. Vyvenko, M. Birkholz, W. Seifert,
      M. Reiche, T. Wilhelm, T. Arguirov, A. Wolff, W. Fritsche, M. Seibt 
      Materials Science and Engineering C 26 (2006) 902 - 910